Technique overview
The following table gives an overview of the techniques available at ELMICAU and the corresponding properties they can measure, alongside the best resolution that can be reached.?
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| ? |
elemental composition |
morphology | surface topology | magnetic structure | chemical map | crystalline structure | special | ||
| 2D | 3D | 2D | 3D | ||||||
| TEM imaging | ? | ? |
<?0.1?nm |
? | ? | ? | ? | ? | strain/stress |
|---|---|---|---|---|---|---|---|---|---|
| TEM/STEM diffraction | ? | ? | ? | ? | ? | ? | ? | < 1 nm | ? |
| TEM Lorentz mode | ? | ? | ? | ? | ? | < 10 nm | ? | ? | ? |
|
HAADF (STEM) |
? | ? | < 0.1 nm | ? | ? | ? | ? | ? | ? |
| EELS (TEM/STEM) | < 0.1 nm | ? | ? | ? | ? | ? | < 0.1 nm | ? | ? |
| EDX (TEM/STEM) | < 0.1 nm | ? | ? | ? | ? | ? | ? | ? | ? |
| HRSTEM imaging | ? | ? | < 0.1 nm | ? | ? | ? | ? | < 0.1 nm | ? |
| DPC (STEM) | ? | ? | ? | ? | ? | < 10 nm | ? | ? |
E-fields:? < 0,1 nm |
| Lorentz-STEM (Cs-corrected) | ? | ? | ? | ? | ? | < 1 nm | ? | ? | ? |
| SE (SEM) | ? | ? | ? | ? | < 5?nm | ? | ? | ? | large-scale images possible |
| BSE (SEM) | < 10 nm | ? | ? | ? | ? | ? | ? | ? | |
| EDX (SEM) | <?50?nm | ? | ? | ? | ? | ? | ? | ? | |
| EBSD (SEM) | ? | ? | ? | ? | ? | ? | ? | < 20?nm | grain orientation |
| Auger?(AES) | < 5 nm | ? | ? | ? | ? | ? | ? | ? | ? |
| TEM/STEM tomography | ? | <?10?nm | ? | <?10?nm | ? | ? | ? | ? | ? |
| FIB tomography | ? | < 100 nm | ? | < 100 nm | ? | ? | ? | ? | ? |
| Auger tomography | ? | <?5?nm | ? |
<?5?nm |
? | ? | ? | ? | ? |
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? ? ? ? ? ? ? ? Elemental composition: differentiation between different elements.
? ? ? ? ? ? ? ? Morphology: the physical texture of the sample, i.e. granular, single-crystalline, amorphous, etc.?
? ? ? ? ? ? ? ? Surface topology: the texture of the sample surface.
????????????? ? Magnetic structure: magnetic domains or domain walls, spin structures like vortices or skyrmions.
????????????? ? Chemical map: differentiation between different elements and their chemical state, e.g. different oxidation levels.
????????????? ? Crystalline structure: Bravais lattice and lattice constants.
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